Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Periodica Polytechnica Electrical Engineering
سال: 2013
ISSN: 0031-532X,1587-3781
DOI: 10.3311/ppee.2066